Effect of Nonionic Polymer as Corrosion Inhibitor in Alkaline Media for Polycrystalline Ge2Sb2Te5 Chemical Mechanical Planarization

The corrosion inhibition effect of different nonionic polymers, which are polyacrylamide (PAM), polyvinyl pyrrolidone (PVP), and polyvinyl alcohol (PVA), on polycrystalline Ge2Sb2Te5 (pc-GST) was investigated in an alkaline media for chemical mechanical planarization. The adsorption affinity and inhibition effect of nonionic polymers on pitting corrosion were observed using x-ray photoelectron spectroscopy and a potentiodynamic polarization curve, respectively. We found that PVP was more effective than the others in inhibiting the pitting corrosion of pc-GST film in the alkaline media.This investigation was financially supported by a collaborative Industry Project between Hanyang University and Hynix Semiconductor Inc., and the Brain Korea 21 Project in 2011. We also would like to thank Sumco Corp. for helping us with the experiments