Development of silicon microelectrodes for cochlear implant technology

Silicon fabrication technology is being explored as a possible solution to the manufacturing of advanced cochlear implant electrode arrays. Silicon probes have been produced with thickness of 5?m and coated in Parylene� polymer to provide strength. To enable handling they are given a backing of silicone rubber before surgical use. This paper presents some techniques used to produce such silicon microelectrodes.8-11 Decembe