Experimental Study of Material Removal at Nanoscale

In order to develop nano-machining into a viable and efficient process, there is a need to achieve a better understand the relation between process parameters (such as feed, speed, and depth of cut) and resulting geometry. In this study, a comprehensive experimental parametric study was conducted to produce a database that is used to select proper machining conditions for guiding the fabrication of precise nano-geometries. The parametric studies conducted using AFM nanosize tips showed the following: normal forces for both nano-indentation and nano-scratching increase as the depth of cut increases. The indentation depth increases with tip speed, but the depth of scratch decrease with increasing tip speed. The width and depth of scratched groove also depend on the scratch angle. The recommended scratch angle is at 90°. The surface roughness increases with step over, especially when the step over is larger than the tip radius. The depth of cut also increases as the step over decreases