Production of hydrogen negative ions in an ECR volume source : balance between vibrational excitation and ionization

The operation of an ECR-driven (2.45 GHz) hydrogen negative ion source is studied. Electron densities and temperatures are investigated with electrostatic probes and negative ion densities are measured with laser photodetachment. Vacuum ultraviolet irradiance measurements are focused on molecular transitions to the ground state while high-resolution visible emission spectroscopy is used to study the transitions between excited states for both molecules and atoms. The standalone operation of the source is found to be more efficient in higher pressures (12 mTorr) where negative ion densities are as high as 4 × 109 cm−3. Further investigation on the operation of the source reveals a rich vibrational spectrum. On the other hand, a limitation on the production of negative ions which is attributed to a lack of low-energy electrons becomes apparent. The underlying mechanisms that lead to this behavior are discussed along with possible solutions to this issue. Finally, the rates of different negative ion destruction processes are estimated and compared.peerReviewe