Add to ORKGRahn S, Kloidt A, Kleineberg U, et al. Large area soft x-ray projection lithography using multilayer mirrors structured by RIE. Spie Proc. 1992 (Soc. Phot. Opt. Inst. Eng.). 1992;1742:585
Heinzmann U. Multilayer-based X-ray optics (polarizers, gratings and mirrors) and their use for XPS-...
For wavelengths in the spectral range of 30 to 300 Angstrom, the structures of multilayer (ML) soft ...
Periodic multilayers are increasingly used as reflecting and beam forming elements in the x-ray rang...
In this paper we present the status of a joint development programme on soft x-ray projection lithog...
In this paper we present the status of a joint development programme on soft x-ray projection lithog...
Heinzmann U. X-ray gratings and projection lithography by means of laterally structured multilayers....
This thesis describes the design, production, and characterization of multilayer mirrors intended as...
In this paper we discuss two techniques to optimize the quality of multilayer x-ray mirrors, namely ...
The deposition of nanometer-multilayer on technical relevant substrates, use as X-ray optics, makes ...
Kleineberg U, Stock HJ, Menke D, et al. Multilayer-coated soft x-ray diffraction gratings for synchr...
We present the recent advances achieved in the Laboratoire de Chimie Physique of Université Paris 6,...
Starting from multilayer systems as X-ray mirrors with a high normal incidence reflectivity (for exa...
A new high-resolution soft X-ray reflectometer system utilizing a laser-plasma light source is descr...
Current technology has made possible the fabrication of multilayered optical elements for soft x-ray...
Schmiedeskamp B, Heidemann B, Kleineberg U, et al. Fabrication and characterization of Si-based soft...
Heinzmann U. Multilayer-based X-ray optics (polarizers, gratings and mirrors) and their use for XPS-...
For wavelengths in the spectral range of 30 to 300 Angstrom, the structures of multilayer (ML) soft ...
Periodic multilayers are increasingly used as reflecting and beam forming elements in the x-ray rang...
In this paper we present the status of a joint development programme on soft x-ray projection lithog...
In this paper we present the status of a joint development programme on soft x-ray projection lithog...
Heinzmann U. X-ray gratings and projection lithography by means of laterally structured multilayers....
This thesis describes the design, production, and characterization of multilayer mirrors intended as...
In this paper we discuss two techniques to optimize the quality of multilayer x-ray mirrors, namely ...
The deposition of nanometer-multilayer on technical relevant substrates, use as X-ray optics, makes ...
Kleineberg U, Stock HJ, Menke D, et al. Multilayer-coated soft x-ray diffraction gratings for synchr...
We present the recent advances achieved in the Laboratoire de Chimie Physique of Université Paris 6,...
Starting from multilayer systems as X-ray mirrors with a high normal incidence reflectivity (for exa...
A new high-resolution soft X-ray reflectometer system utilizing a laser-plasma light source is descr...
Current technology has made possible the fabrication of multilayered optical elements for soft x-ray...
Schmiedeskamp B, Heidemann B, Kleineberg U, et al. Fabrication and characterization of Si-based soft...
Heinzmann U. Multilayer-based X-ray optics (polarizers, gratings and mirrors) and their use for XPS-...
For wavelengths in the spectral range of 30 to 300 Angstrom, the structures of multilayer (ML) soft ...
Periodic multilayers are increasingly used as reflecting and beam forming elements in the x-ray rang...