CVD with Tri-(n)butylphosphine silver(I) complexes: Mass spectrometric investigations and depositions

Haase T, Kohse-Höinghaus K, Bahlawane N, Djiele P, Jakob A, Lang H. CVD with Tri-(n)butylphosphine silver(I) complexes: Mass spectrometric investigations and depositions. CHEMICAL VAPOR DEPOSITION. 2005;11(4):195-205.Tri-(n)butylphosphine silver(I) complexes were synthesized and characterized with respect to their suitability for the CVD of silver thin films. The volatility and thermal stability of these complexes were investigated using temperature-programmed and in-situ mass spectrometry (MS). Complexes with smaller carboxylate ligands showed superior long-term stability and had the advantage of evaporation without decomposition. Careful examination of the fragments detected during evaporation and in a CVD reactor allowed us to propose the gas-phase decomposition mechanisms of some potentially suitable silver precursors. Deposition experiments in a cold-wall CVD reactor using selected precursors resulted in smooth and conductive silver coatings