Bu3P-Silber(I)-ß-Diketonate: Synthese, Gasphasenuntersuchungen und Verwendung als CVD-Precursoren

Schmidt H, Jakob A, Haase T, et al. Bu3P-Silber(I)-ß-Diketonate: Synthese, Gasphasenuntersuchungen und Verwendung als CVD-Precursoren. Zeitschrift für anorganische und allgemeine Chemie. 2005;631(13-14):2786-2791.The synthesis if the silver(I) salts [AgX] (3a, X = acetylacetonate, acac; 3b, X = 1,1,1,5,5,5-hexafluoroacetylacetonate, hfac; 3c, X = 1,3-diphenyl-1,3-propanedionate, dipa) by the reaction of [AgNO3] (1) with H-X (2a, X = acac; 2b, X = hfac; 2c, X = dipa), or [Ag2O] (4) with 2b is reported. The addition of (Bu3P)-Bu-n (5) to 3a - 3c inn the ratios of 1:1 and 2:1, respectively, affords the phosphane silver (I) beta-diketonates [((Bu3P)-Bu-n)(m)AgX] (m = 1: 6a, X = acac; 6b, X = hfac; 6c, X = dipa. m = 2: 7a, X = acac; 7b, X = hfac; 7c, X = dipa) in yield. The thermal behavior (thermogravimetry) and gas phase properties (temperature-programmed mass spectrometry) of selected species are discussed. Complex 7a can successfully be used in deposition of silver on titanium nitride coated oxidized silicon wafers by the CVD process (CVD = Chemical Vapour Deposition). SEM studies show that homogeneous and continous silver layers were obtained