Temperature drift compensation for nanostructure analysis

An ultra high vacuum apparatus for nanostructure experiments is being developed by the Tescan company in cooperation with the Institute of Physical Engineering of the Faculty of Mechanical Engineering. The apparatus is designed for preparation, modification, and analysis of nano-scale structures. A sample holder which allows heating and cooling has been developed for the apparatus. A scanning electron microscope is attached to the chamber to provide analytical and manufacturing capabilities. During experiments with heating enabled, the sample moves relative to the SEM column, causing drift of the image. This bachelor thesis proposes a solution to the problem of temperature drift by the means of motion tracking based on image registration using Fourier transform. An application complementary to the SEM control software which implements the algorithm was designed and tested at the instrument