Gas phase study of systems for the CVD of silver

Haase T, Kohse-Höinghaus K, Atakan B, Schmidt H, Lang H. Gas phase study of systems for the CVD of silver. CHEMICAL VAPOR DEPOSITION. 2003;9(3):144-148.Suitable strategies for the deposition of silver require knowledge of the interplay of gas phase and surface chemistry, hence the gas phase of several potential silver(i) precursor systems have been analyzed by molecular beam mass spectrometry. Specifically, the decomposition of silver(i) trifluoroacetate, silver(i) pentafluoropropionate, (trifluoroacetato)bis(tri-n-butylphosphine) silver(i), and (pentafluoropropionato)bis(tri-n-butylphosphine) silver(i) have been investigated under hot-wall CVD conditions. The experiments show that, under the conditions investigated, the silver carboxylates [AgO2CR] (R = CF3, C2F5) are not suitable, while the phosphane-stabilized silver(i) carboxylates [(n-Bu3P)(2)AgO2CR] (R = CF3, C2F5) are promising candidates. The thermal stability and potential formation mechanisms of the observed silver-containing fragments are discussed