Simulation of Electron-matter Interaction during wet-STEM Electron Tomography

5th Nanoscience and Nanotechnology Symposium (NNS), Surabaya, INDONESIA, OCT 23-25, 2013International audienceTomography is an efficient tool to probe the 3 dimensional (3D) structure of materials. In the laboratory, a device has been developed to perform electron tomography in an environmental scanning electron microscopy (ESEM). The configuration of Scanning Transmission Electron Microscopy (STEM) in Environmental Scanning Electron Microscopy (ESEM) provides a novel approach for the characterization of the 3D structure of materials and optimizes a compromise between the resolution level of a few nm and the large tomogram due to the high thickness of transparency. Moreover, STEM allows the observation in 2D of wet samples in an ESEM by finely controlling the sample temperature and the water pressure of the sample environment. It has been recently demonstrated that it was possible to acquire image series of hydrated objects and thus to attain 3D characterization of wet samples. In order to get reliable and quantitative data, the present study deals with the simulation of electron-matter interactions. From such simulation on the MCM-41 material, we determine the minimum quantity of water layer which can be detected on wet materials