A new scale-up concept for microwave assisted flow processing is presented where modular scale-up is achieved by implementing microwave cavities in series. The scale-up concept is demonstrated for case studies of a packed-bed reactor and a wall-coated tubular reactor. With known kinetics and reaction temperature, a packed-bed reactor gave a conversion of 99% with the highest production rate of 170 kgprod/kgcat·h for esterification of acetic acid and ethanol catalyzed by ion-exchange resin in 18 cavities. A similar approach for a multicomponent reaction of benzaldehyde, piperidine, and phenylacetylene catalyzed by a thin Cu film in a wall-coated tubular reactor gave 99% conversion with the highest production rate of 7740 kgprod/kgcat·h in 28...