Heterogeneous hydride pyrolysis in a chemical beam epitaxy cracker cell and growth of high quality InP

The decomposition of phosphine and arsine in a chemical beam epitaxy cracker cell was investigated with a quadrupole mass spectrometer. We have determined the kinetical parameters for a unimolecular reaction of the first order, i.e. the activation energy and frequency factor, from the decomposition efficiency as a function of temperature. These results are compared with data from literature. We find the lowest activation energies ever reported for the hydride pyrolysis, namely 72 and 48 kJ/mol for phosphine and arsine, respectively. This is due to the heterogeneous decomposition on catalytic molybdenum baffles inside the cracker cell. Additionally, we have studied the impurity incorporation in epitaxially grown bulk InP layers in relation to the efficiency of this particular molybdenum containing cracker cell. Impurity levels were determined by fitting calculated Hall values to experimental data. The best quality is achieved for the cracker temperature at which the efficiency starts to saturate. At this cracker temperature, optimized mass flow rates resulted in InP layers with a maximum mobility of 186¿000 cm2/V¿s and impurity concentrations in the low 1014 cm-3 range