A new metrological AFM is developed for the Dutch standards laboratory. This instrument consists of a translation stage with a stroke of 1×1×1 mm and a custom-designed AFM measurement head. Here the design of the translation stage, consisting of elastic straight guides, Lorentz-actuators with weight and stiffness compensation and interferometric translation measurement systems, will be discussed. Some preliminary results on the performance of the actuation system are presented
This paper presents the design process for the optimisation of a nano-precision actuation stage for ...
Submicron positioning stages are an invaluable tool in a variety of high precision applications incl...
A displacement generator is realized which enables the calibration of a wide variety of displacement...
A new metrological AFM is developed for the Dutch standards laboratory. This instrument consists of ...
A new traceable metrological AFM with a measuring volume of 1x1x1 mm is being developed for the Dutc...
The design of a large measurement-volume metrological atomic force microscope (AFM) is presented. Th...
A metrological Atomic Force Microscope (mAFM) has been developed at LNE [1, 2]. It is mainly used fo...
KULeuven is currently developing a metrological atomic force microscope (metrological AFM), with an ...
This paper presents the design and fabrication of a long scan stage for metrological atomic force mi...
Advances in the electronics sector, medicine and material sciences have increased the need for inspe...
In order to obtain the high accuracy required for a metrological atomic force microscope, the sample...
KULeuven is currently developing on demand of and for the national Belgian Metrology Laboratory (SMD...
A high precision profilometry system was developed primarily for the inspection of two-sided sample ...
We are constructing the AFM based nano-measuring machine with long measuring range for the metrologi...
Atomic force microscope (AFM) users often calibrate the spring constants of cantilevers using functi...
This paper presents the design process for the optimisation of a nano-precision actuation stage for ...
Submicron positioning stages are an invaluable tool in a variety of high precision applications incl...
A displacement generator is realized which enables the calibration of a wide variety of displacement...
A new metrological AFM is developed for the Dutch standards laboratory. This instrument consists of ...
A new traceable metrological AFM with a measuring volume of 1x1x1 mm is being developed for the Dutc...
The design of a large measurement-volume metrological atomic force microscope (AFM) is presented. Th...
A metrological Atomic Force Microscope (mAFM) has been developed at LNE [1, 2]. It is mainly used fo...
KULeuven is currently developing a metrological atomic force microscope (metrological AFM), with an ...
This paper presents the design and fabrication of a long scan stage for metrological atomic force mi...
Advances in the electronics sector, medicine and material sciences have increased the need for inspe...
In order to obtain the high accuracy required for a metrological atomic force microscope, the sample...
KULeuven is currently developing on demand of and for the national Belgian Metrology Laboratory (SMD...
A high precision profilometry system was developed primarily for the inspection of two-sided sample ...
We are constructing the AFM based nano-measuring machine with long measuring range for the metrologi...
Atomic force microscope (AFM) users often calibrate the spring constants of cantilevers using functi...
This paper presents the design process for the optimisation of a nano-precision actuation stage for ...
Submicron positioning stages are an invaluable tool in a variety of high precision applications incl...
A displacement generator is realized which enables the calibration of a wide variety of displacement...
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