A silicon-etched probe for 3-D coordinate measurements with an uncertainty below 0.1 μm

The increasing demand for accurate coordinate measurements on products demands new concepts of probe design. Results of some realized designs will be given. One of the most promising utilizes microtechnology and etching in silicon in order to realize the necessary dimensional design with flexure hinges. Microtechnology is also used for the detection system; strain gages are integrated in the probe. Results for two probes will be given and possible future developments will be discussed