Membrane-based high efficiency metallic grating couplers for integrated photonics
- Higuera-Rodriguez, A.
- Dolores-Calzadilla, V.
- Jiao, Y.
- Geluk, E. J.
- Heiss, D.
- Smit, M.
Publication date
January 2016
DOI Publisher
Institute of Electrical and Electronics Engineers (IEEE)Abstract
We developed a novel buried metal grating coupler for membrane platforms. We experimentally demonstrated a chip-to-fiber coupling efficiency of 56%, which makes them an attractive building block for on-wafer testing and dense optical interconnects
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