Add to ORKGThis paper concerns measurements with a nineaxes laser interferometer system, to determine the six-Degree-of-Freedom (DoF) performance of an electromagnetically levitated moving-magnet planar actuator with long-stroke capability in the plane. The new measurement system has 0.15 nm resolution over the full xy-stroke of 0.223 m × 0.223 m. The limitations on the attainable closed-loop tracking performance have been determined experimentally. The high performance measurement system has a negligible influence on this tracking performance. Consequently, the measured performance limitations are due to the actuator and the applied control method
Abstract – In this paper, a novel planar type magnetic levitation system without other assistant dev...
A large-scale magnetically-levitated planar motor has the potential to revolutionize conveying and f...
A kinematically coupled magnetic-bearing calibration fixture was designed based on the previous work...
This paper concerns measurements with a nineaxes laser interferometer system, to determine the six-D...
This paper presents an analysis of the tracking performance of a planar three degrees of freedom (DO...
This paper concerns the design and test of a ironless three degree-of-freedom linear actuator. The m...
This paper discusses experimental results of a moving-magnet planar actuator with integratedmagnetic...
High-precision positioning systems, such as lithography wafer scanners, vibration isolators and grav...
Magnetic levitation actuation has proven to be a viable solution in many applications where high per...
This thesis presents the development and verification of a multi-degree of freedom (DOF), non-contac...
The development of contactless electromagnetically levitated positioning systems is stimulated by th...
We have designed and tested a novel linear actuator system with 1-angstrom closed-loop control resol...
The rapidly expanding fields of micro and nano engineering, biotechnology and medical sciences have ...
Micro/nano-positioning stages are at the core of a wide range of machines and instruments such as li...
Due to the character of the original source materials and the nature of batch digitization, quality ...
Abstract – In this paper, a novel planar type magnetic levitation system without other assistant dev...
A large-scale magnetically-levitated planar motor has the potential to revolutionize conveying and f...
A kinematically coupled magnetic-bearing calibration fixture was designed based on the previous work...
This paper concerns measurements with a nineaxes laser interferometer system, to determine the six-D...
This paper presents an analysis of the tracking performance of a planar three degrees of freedom (DO...
This paper concerns the design and test of a ironless three degree-of-freedom linear actuator. The m...
This paper discusses experimental results of a moving-magnet planar actuator with integratedmagnetic...
High-precision positioning systems, such as lithography wafer scanners, vibration isolators and grav...
Magnetic levitation actuation has proven to be a viable solution in many applications where high per...
This thesis presents the development and verification of a multi-degree of freedom (DOF), non-contac...
The development of contactless electromagnetically levitated positioning systems is stimulated by th...
We have designed and tested a novel linear actuator system with 1-angstrom closed-loop control resol...
The rapidly expanding fields of micro and nano engineering, biotechnology and medical sciences have ...
Micro/nano-positioning stages are at the core of a wide range of machines and instruments such as li...
Due to the character of the original source materials and the nature of batch digitization, quality ...
Abstract – In this paper, a novel planar type magnetic levitation system without other assistant dev...
A large-scale magnetically-levitated planar motor has the potential to revolutionize conveying and f...
A kinematically coupled magnetic-bearing calibration fixture was designed based on the previous work...