The deformation of the moving magnet plate of a commutated magnetically levitated planar actuator

This paper presents a method to calculate the deformation of the magnet plate of a commutated magnetically levitated planar actuator using a linked electromagnetic–mechanical model. The force and torque distribution on the moving magnet array is obtained from an electromagnetic model based on the surface charge method and the Lorentz force and torque integral. The mechanical model is a state-space model derived from FEM. This mechanical model uses the force and torque distribution to determine the deformation of the magnet plate during movement due to the commutated coil set