Low-pressure chemical vapor deposition as a tool for deposition of thin film battery materials
- Oudenhoven, J.F.M.
- Dongen, van, T.
- Niessen, R.A.H.
- Croon, de, M.H.J.M.
- Notten, P.H.L.
Publication date
January 2009
DOI Publisher
Electrochemical Socity Citation count (estimate)
2Abstract
Low Pressure Chemical Vapor Deposition was utilized for the deposition of LiCoO2 cathode materials for all-solid-state thin-film micro-batteries. To obtain insight in the deposition process, the most important process parameters were optimized for the deposition of crystalline electrode films on planar substrates. Also the electrochemical activity of the obtained LiCoO2 films was demonstrated. © The Electrochemical Society
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