Add to ORKGA linear motor having a high driving force, high efficiency and low normal force comprises two opposed magnet tracks and an armature comprising three open coil sets. The linear motor may be used to drive a stage, such as, for example, a mask or wafer stage, in a lithographic apparatus
This paper introduces a novel approach on the design of a linear synchronous motor for drive of belt...
There is tight electromagnetic and mechanical coupling among planar motor (PM) 6- degree of freedom ...
A microengine uses two synchronized linear actuators as a power source and converts oscillatory moti...
A linear motor having a high driving force, high efficiency and low normal force comprises two oppos...
A linear motor having a high driving force, high efficiency and low normal force comprises two oppos...
A linear motor having a high driving force, high efficiency and low normal force comprises two oppos...
Stages used in semiconductor lithography system must satisfy needs of high precision positioning. Th...
The present invention relates to a linear motor having improved functionality and design for large d...
An ironless linear motor (5) comprising a magnet track (53) and a coil assembly (50) operating in co...
An ironless linear motor (5) comprising a magnet track (53) and a coil assembly (50) operating in co...
An ironless linear motor (5) comprising a magnet track (53) and a coil assembly (50) operating in co...
An ironless linear motor (5) comprising a magnet track (53) and a coil assembly (50) operating in co...
Linear motor has been applied in various fields such as factory and office automation. A linear moto...
This project is about designing a linear motor/generator. Linear motor/generator or linear machine i...
The first part of this thesis deals with the study of linear motors. The introduction of the thesis ...
This paper introduces a novel approach on the design of a linear synchronous motor for drive of belt...
There is tight electromagnetic and mechanical coupling among planar motor (PM) 6- degree of freedom ...
A microengine uses two synchronized linear actuators as a power source and converts oscillatory moti...
A linear motor having a high driving force, high efficiency and low normal force comprises two oppos...
A linear motor having a high driving force, high efficiency and low normal force comprises two oppos...
A linear motor having a high driving force, high efficiency and low normal force comprises two oppos...
Stages used in semiconductor lithography system must satisfy needs of high precision positioning. Th...
The present invention relates to a linear motor having improved functionality and design for large d...
An ironless linear motor (5) comprising a magnet track (53) and a coil assembly (50) operating in co...
An ironless linear motor (5) comprising a magnet track (53) and a coil assembly (50) operating in co...
An ironless linear motor (5) comprising a magnet track (53) and a coil assembly (50) operating in co...
An ironless linear motor (5) comprising a magnet track (53) and a coil assembly (50) operating in co...
Linear motor has been applied in various fields such as factory and office automation. A linear moto...
This project is about designing a linear motor/generator. Linear motor/generator or linear machine i...
The first part of this thesis deals with the study of linear motors. The introduction of the thesis ...
This paper introduces a novel approach on the design of a linear synchronous motor for drive of belt...
There is tight electromagnetic and mechanical coupling among planar motor (PM) 6- degree of freedom ...
A microengine uses two synchronized linear actuators as a power source and converts oscillatory moti...