The parallel nanowire detector (PND) is a photon number resolving (PNR) detector that uses spatial multiplexing on a subwavelength scale to provide a single electrical output proportional to the photon number. The basic structure of the PND is the parallel connection of several NbN superconducting nanowires (˜100nm wide, a few nm thick), folded in a meander pattern. PNDs were fabricated on 3-4 nm thick NbN films grown on MgO (Ts= 400 °C) substrates by reactive magnetron sputtering in an Ar/N2 gas mixture. The device performance was characterized in terms of speed and sensitivity. PNDs showed a counting rate of 80 MHz and a pulse duration as low as 660 ps full-width at half-maximum (FWHM). Building the histograms of the photoresponse peak, n...