Test sequencing in a complex manufacturing system

Testing complex manufacturing systems, like the ASML TWINSCAN [2] lithographic machine, takes a lot of time and costs. Within the Tangram project, methods are investigated to reduce this test costs. In this article, we describe a method which is used to optimize a test sequence such that it takes the least amount of costs, or time. With several cases we demonstrate that this method can be used to optimize test sequences within the manufacturing of a TWINSCAN lithographic machine such that cycle time is reduced