A new traceable metrological AFM with a measuring volume of 1x1x1 mm is being developed for the Dutch metrology institute (NMi - Van Swinden Laboratory). The instrument consists of a low-hysteresis elastic translation stage and a custom designed, kinematically mounted AFM measurement head. Here a short overview of the translation stage design will be given and some preliminary results presented
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A new traceable metrological AFM with a measuring volume of 1x1x1 mm is being developed for the Dutc...
A new metrological AFM is developed for the Dutch standards laboratory. This instrument consists of ...
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A metrological Atomic Force Microscope (mAFM) has been developed at LNE [1, 2]. It is mainly used fo...
We are constructing the AFM based nano-measuring machine with long measuring range for the metrologi...
KULeuven is currently developing a metrological atomic force microscope (metrological AFM), with an ...
Advances in the electronics sector, medicine and material sciences have increased the need for inspe...
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KULeuven is currently developing on demand of and for the national Belgian Metrology Laboratory (SMD...
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A displacement generator is realized which enables the calibration of a wide variety of displacement...
It is now fully appreciated that metrology will play an integral role in the successful development ...
A high precision profilometry system was developed primarily for the inspection of two-sided sample ...
This paper describes the design of a flexure-guided, two-axis nanopositioner (scanner) driven by pie...
Low measurement speed remains as a major shortcoming of the scanning probe microscopic techniques. I...
A new traceable metrological AFM with a measuring volume of 1x1x1 mm is being developed for the Dutc...
A new metrological AFM is developed for the Dutch standards laboratory. This instrument consists of ...
The design of a large measurement-volume metrological atomic force microscope (AFM) is presented. Th...
A metrological Atomic Force Microscope (mAFM) has been developed at LNE [1, 2]. It is mainly used fo...
We are constructing the AFM based nano-measuring machine with long measuring range for the metrologi...
KULeuven is currently developing a metrological atomic force microscope (metrological AFM), with an ...
Advances in the electronics sector, medicine and material sciences have increased the need for inspe...
This paper presents the design and fabrication of a long scan stage for metrological atomic force mi...
KULeuven is currently developing on demand of and for the national Belgian Metrology Laboratory (SMD...
This abstract presents the development of an Atomic Force Microscope (AFM) vertical scanner for surf...
A displacement generator is realized which enables the calibration of a wide variety of displacement...
It is now fully appreciated that metrology will play an integral role in the successful development ...
A high precision profilometry system was developed primarily for the inspection of two-sided sample ...
This paper describes the design of a flexure-guided, two-axis nanopositioner (scanner) driven by pie...
Low measurement speed remains as a major shortcoming of the scanning probe microscopic techniques. I...