Plasma properties of a novel commercial plasma source for high-throughput processing of c-Si solar cells

High-rate deposition of silicon nitride and silicon oxide films for surface passivation and (anti)reflection coating applications

Hoex, B.
Peeters, F.J.J.
van Erven, A.J.M.
Bijker, M.D.
Kessels, W.M.M.
Sanden, van de, M.C.M.

January 2005

In order to increase the cost-effectiveness of crystalline silicon solar cells, surface passivation ...

High-rate deposition of a-SiNx:H for photovoltaic applications by the expanding thermal plasma

Kessels, WMM Erwin
Hong, JG
Assche, FJH Ferdie van
Moschner, JD
Lauinger, T
Soppe, Wim J
Weeber, Arthur
Schram, DC Daan
Sanden, MCM Richard van de

January 2002

Driven by the need for improvement of the economical competitiveness of photovoltaic energy, the fea...

High-rate deposition of a-SiNx:H for photovoltaic applications by the expanding thermal plasma

Kessels, W.M.M.
Hong, J.
Assche, van, F.J.H.
Moschner, J.D.
Lauinger, T.
Soppe, W.J.
Weeber, A.W.
Schram, D.C.
Sanden, van de, M.C.M.

January 2002

Driven by the need for improvement of the economical competitiveness of photovoltaic energy, the fea...

Plasma properties of a novel commercial plasma source for high-throughput processing of c-Si solar cells

Oever, van den, P.J.
Kessels, W.M.M.
Hoex, B.
Bosch, R.C.M.
van Erven, A.J.M.
Pennings, R.L.J.R.
Stals, W.T.M.
Bijker, M.D.
Sanden, van de, M.C.M.

January 2005

A novel commercial plasma source for highthroughput processing of crystalline silicon solar cells is...

Plasma properties of a novel commercial plasma source for high-throughput processing of c-Si solar cells

Oever, van den, P.J.
Kessels, W.M.M.
Hoex, B.
Bosch, R.C.M.
van Erven, A.J.M.
Pennings, R.L.J.R.
Stals, W.T.M.
Bijker, M.D.
Sanden, van de, M.C.M.

January 2005

A novel commercial plasma source for highthroughput processing of crystalline silicon solar cells is...

Plasma properties of a novel commercial plasma source for high-throughput processing of c-Si solar cells

Oever, van den, P.J.
Kessels, W.M.M.
Hoex, B.
Bosch, R.C.M.
van Erven, A.J.M.
Pennings, R.L.J.R.
Stals, W.T.M.
Bijker, M.D.
Sanden, van de, M.C.M.

January 2005

A novel commercial plasma source for highthroughput processing of crystalline silicon solar cells is...

Plasma properties of a novel commercial plasma source for high-throughput processing of c-Si solar cells

Oever, van den, P.J.
Kessels, W.M.M.
Hoex, B.
Bosch, R.C.M.
van Erven, A.J.M.
Pennings, R.L.J.R.
Stals, W.T.M.
Bijker, M.D.
Sanden, van de, M.C.M.

January 2005

A novel commercial plasma source for highthroughput processing of crystalline silicon solar cells is...

HIGH-QUALITY SURFACE PASSIVATION OBTAINED BY HIGH-RATE DEPOSITED SILICON NITRIDE, SILICON DIOXIDE AND AMORPHOUS SILICON USING THE VERSATILE EXPANDING THERMAL PLASMA TECHNIQUE

October 2016

The expanding thermal plasma (ETP) is a novel plasma technique currently used by several solar cell ...

Industrial implementation of plasma deposition using the expanding thermal plasma technique

Sanden, MCM Richard van de
Oever, PJ Peter van den
Creatore, M Adriana
Schaepkens, M Marc
Miebach, T
Iacovangelo, CD
Bosch, RCM Roeland
Bijker, MD
Evers, MFJ
Schram, DC Daan
Kessels, WMM Erwin

January 2004

Two successful industrial implementations of the expanding thermal plasma setup, a novel plasma sour...

Industrial implementation of plasma deposition using the expanding thermal plasma technique

Sanden, van de, M.C.M.
Oever, van den, P.J.
Creatore, M.
Schaepkens, M.
Miebach, T.
Iacovangelo, C.D.
Bosch, R.C.M.
Bijker, M.D.
Evers, M.F.J.
Schram, D.C.
Kessels, W.M.M.

January 2004

Two successful industrial implementations of the expanding thermal plasma setup, a novel plasma sour...

A novel commercial plasma source for ultrahigh-rate deposition of silicon nitride for solar cells

Oever, van den, P.J.
Kessels, W.M.M.
Hoex, B.
Bosch, R.C.M.
van Erven, A.J.M.
Bijker, M.D.
Sanden, van de, M.C.M.

January 2005

Recently, a new inline tool for high rate deposition of silicon nitride for (multi) crystalline sili...

A novel commercial plasma source for ultrahigh-rate deposition of silicon nitride for solar cells

Oever, PJ Peter van den
Kessels, WMM Erwin
Hoex, B Bram
Bosch, RCM Roeland
Erven, AJM van
Bijker, MD
Sanden, MCM Richard van de

January 2005

Recently, a new inline tool for high rate deposition of silicon nitride for (multi) crystalline sili...

High-rate deposition of silicon nitride and silicon oxide films for surface passivation and (anti)reflection coating applications

Hoex, B Bram
Peeters, FJJ Floran
Erven, AJM van
Bijker, MD
Kessels, WMM Erwin
Sanden, MCM Richard van de

January 2005

In order to increase the cost-effectiveness of crystalline silicon solar cells, surface passivation ...

High-rate deposition of silicon nitride and silicon oxide films for surface passivation and (anti)reflection coating applications

Hoex, B.
Peeters, F.J.J.
van Erven, A.J.M.
Bijker, M.D.
Kessels, W.M.M.
Sanden, van de, M.C.M.

January 2005

In order to increase the cost-effectiveness of crystalline silicon solar cells, surface passivation ...

High-rate deposition of silicon nitride and silicon oxide films for surface passivation and (anti)reflection coating applications

Hoex, B.
Peeters, F.J.J.
van Erven, A.J.M.
Bijker, M.D.
Kessels, W.M.M.
Sanden, van de, M.C.M.

January 2005

In order to increase the cost-effectiveness of crystalline silicon solar cells, surface passivation ...

High-rate deposition of silicon nitride and silicon oxide films for surface passivation and (anti)reflection coating applications

Hoex, B.
Peeters, F.J.J.
van Erven, A.J.M.
Bijker, M.D.
Kessels, W.M.M.
Sanden, van de, M.C.M.

January 2005

In order to increase the cost-effectiveness of crystalline silicon solar cells, surface passivation ...

High-rate deposition of a-SiNx:H for photovoltaic applications by the expanding thermal plasma

Kessels, WMM Erwin
Hong, JG
Assche, FJH Ferdie van
Moschner, JD
Lauinger, T
Soppe, Wim J
Weeber, Arthur
Schram, DC Daan
Sanden, MCM Richard van de

January 2002

Driven by the need for improvement of the economical competitiveness of photovoltaic energy, the fea...

High-rate deposition of a-SiNx:H for photovoltaic applications by the expanding thermal plasma

Kessels, W.M.M.
Hong, J.
Assche, van, F.J.H.
Moschner, J.D.
Lauinger, T.
Soppe, W.J.
Weeber, A.W.
Schram, D.C.
Sanden, van de, M.C.M.

January 2002

Driven by the need for improvement of the economical competitiveness of photovoltaic energy, the fea...

Plasma properties of a novel commercial plasma source for high-throughput processing of c-Si solar cells

Oever, van den, P.J.
Kessels, W.M.M.
Hoex, B.
Bosch, R.C.M.
van Erven, A.J.M.
Pennings, R.L.J.R.
Stals, W.T.M.
Bijker, M.D.
Sanden, van de, M.C.M.

January 2005

A novel commercial plasma source for highthroughput processing of crystalline silicon solar cells is...

Plasma properties of a novel commercial plasma source for high-throughput processing of c-Si solar cells

Oever, van den, P.J.
Kessels, W.M.M.
Hoex, B.
Bosch, R.C.M.
van Erven, A.J.M.
Pennings, R.L.J.R.
Stals, W.T.M.
Bijker, M.D.
Sanden, van de, M.C.M.

January 2005

A novel commercial plasma source for highthroughput processing of crystalline silicon solar cells is...

Plasma properties of a novel commercial plasma source for high-throughput processing of c-Si solar cells

Oever, van den, P.J.
Kessels, W.M.M.
Hoex, B.
Bosch, R.C.M.
van Erven, A.J.M.
Pennings, R.L.J.R.
Stals, W.T.M.
Bijker, M.D.
Sanden, van de, M.C.M.

January 2005

A novel commercial plasma source for highthroughput processing of crystalline silicon solar cells is...

Plasma properties of a novel commercial plasma source for high-throughput processing of c-Si solar cells

Oever, van den, P.J.
Kessels, W.M.M.
Hoex, B.
Bosch, R.C.M.
van Erven, A.J.M.
Pennings, R.L.J.R.
Stals, W.T.M.
Bijker, M.D.
Sanden, van de, M.C.M.

January 2005

A novel commercial plasma source for highthroughput processing of crystalline silicon solar cells is...

HIGH-QUALITY SURFACE PASSIVATION OBTAINED BY HIGH-RATE DEPOSITED SILICON NITRIDE, SILICON DIOXIDE AND AMORPHOUS SILICON USING THE VERSATILE EXPANDING THERMAL PLASMA TECHNIQUE

October 2016

The expanding thermal plasma (ETP) is a novel plasma technique currently used by several solar cell ...

Industrial implementation of plasma deposition using the expanding thermal plasma technique

Sanden, MCM Richard van de
Oever, PJ Peter van den
Creatore, M Adriana
Schaepkens, M Marc
Miebach, T
Iacovangelo, CD
Bosch, RCM Roeland
Bijker, MD
Evers, MFJ
Schram, DC Daan
Kessels, WMM Erwin

January 2004

Two successful industrial implementations of the expanding thermal plasma setup, a novel plasma sour...

Industrial implementation of plasma deposition using the expanding thermal plasma technique

Sanden, van de, M.C.M.
Oever, van den, P.J.
Creatore, M.
Schaepkens, M.
Miebach, T.
Iacovangelo, C.D.
Bosch, R.C.M.
Bijker, M.D.
Evers, M.F.J.
Schram, D.C.
Kessels, W.M.M.

January 2004

Two successful industrial implementations of the expanding thermal plasma setup, a novel plasma sour...

A novel commercial plasma source for ultrahigh-rate deposition of silicon nitride for solar cells

Oever, van den, P.J.
Kessels, W.M.M.
Hoex, B.
Bosch, R.C.M.
van Erven, A.J.M.
Bijker, M.D.
Sanden, van de, M.C.M.

January 2005

Recently, a new inline tool for high rate deposition of silicon nitride for (multi) crystalline sili...

A novel commercial plasma source for ultrahigh-rate deposition of silicon nitride for solar cells

Oever, PJ Peter van den
Kessels, WMM Erwin
Hoex, B Bram
Bosch, RCM Roeland
Erven, AJM van
Bijker, MD
Sanden, MCM Richard van de

January 2005

Recently, a new inline tool for high rate deposition of silicon nitride for (multi) crystalline sili...

High-rate deposition of silicon nitride and silicon oxide films for surface passivation and (anti)reflection coating applications

Hoex, B Bram
Peeters, FJJ Floran
Erven, AJM van
Bijker, MD
Kessels, WMM Erwin
Sanden, MCM Richard van de

January 2005

In order to increase the cost-effectiveness of crystalline silicon solar cells, surface passivation ...

High-rate deposition of silicon nitride and silicon oxide films for surface passivation and (anti)reflection coating applications

Hoex, B.
Peeters, F.J.J.
van Erven, A.J.M.
Bijker, M.D.
Kessels, W.M.M.
Sanden, van de, M.C.M.

January 2005

In order to increase the cost-effectiveness of crystalline silicon solar cells, surface passivation ...

High-rate deposition of silicon nitride and silicon oxide films for surface passivation and (anti)reflection coating applications

Hoex, B.
Peeters, F.J.J.
van Erven, A.J.M.
Bijker, M.D.
Kessels, W.M.M.
Sanden, van de, M.C.M.

January 2005

In order to increase the cost-effectiveness of crystalline silicon solar cells, surface passivation ...

High-rate deposition of silicon nitride and silicon oxide films for surface passivation and (anti)reflection coating applications

Hoex, B.
Peeters, F.J.J.
van Erven, A.J.M.
Bijker, M.D.
Kessels, W.M.M.
Sanden, van de, M.C.M.

January 2005

In order to increase the cost-effectiveness of crystalline silicon solar cells, surface passivation ...

High-rate deposition of a-SiNx:H for photovoltaic applications by the expanding thermal plasma

Kessels, WMM Erwin
Hong, JG
Assche, FJH Ferdie van
Moschner, JD
Lauinger, T
Soppe, Wim J
Weeber, Arthur
Schram, DC Daan
Sanden, MCM Richard van de

January 2002

Driven by the need for improvement of the economical competitiveness of photovoltaic energy, the fea...

High-rate deposition of a-SiNx:H for photovoltaic applications by the expanding thermal plasma

Kessels, W.M.M.
Hong, J.
Assche, van, F.J.H.
Moschner, J.D.
Lauinger, T.
Soppe, W.J.
Weeber, A.W.
Schram, D.C.
Sanden, van de, M.C.M.

January 2002

Driven by the need for improvement of the economical competitiveness of photovoltaic energy, the fea...

Plasma properties of a novel commercial plasma source for high-throughput processing of c-Si solar cells

Abstract

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Plasma properties of a novel commercial plasma source for high-throughput processing of c-Si solar cells

Abstract

Extracted data

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