Photoacoustic characterization of custom-made thin film AlN MEMS ultrasound transducers
- Kusch, Jonas
- Flockhart, Gordon M.H.
- Bauer, Ralf
- Uttamchandani, Deepak
Publication date
September 2018
DOI Publisher
Institute of Electrical and Electronics Engineers (IEEE)Abstract
Two MEMS thin film aluminium nitride ultrasound transducer array designs for photoacoustic sensing applications are presented. They are characterized using the pitch and catch technique and photoacoustic excitation. The results of both approaches are subsequently compared
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