Studies of High-Dose Ion Implantation in Silicon

Tsai, Mon Yen

Publisher

Coordinated Science Laboratory, University of Illinois at Urbana-Champaign

Abstract

Coordinated Science Laboratory changed its name from Control Systems LaboratoryJoint Services Electronics Program / DAAB-07-72-C-0259National Science Foundation / NSF DMR 77-22228U of I OnlyRestricted to UIUC communit

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Studies of High-Dose Ion Implantation in Silicon

Abstract

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Studies of High-Dose Ion Implantation in Silicon

Abstract

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