Development of novel series and parallel sensing system based on nanostructured surface enhanced Raman scattering substrate for biomedical application

With the advance of nanofabrication, the capability of nanoscale metallic structure fabrication opens a whole new study in nanoplasmonics, which is defined as the investigation of photon-electron interaction in the vicinity of nanoscale metallic structures. The strong oscillation of free electrons at the interface between metal and surrounding dielectric material caused by propagating surface plasmon resonance (SPR) or localized surface plasmon resonance (LSPR) enables a variety of new applications in different areas, especially biological sensing techniques. One of the promising biological sensing applications by surface resonance polariton is surface enhanced Raman spectroscopy (SERS), which significantly reinforces the feeble signal of traditional Raman scattering by at least 104 times. It enables highly sensitive and precise molecule identification with the assistance of a SERS substrate. Until now, the design of new SERS substrate fabrication process is still thriving since no dominant design has emerged yet. The ideal process should be able to achieve both a high sensitivity and low cost device in a simple and reliable way. In this thesis two promising approaches for fabricating nanostructured SERS substrate are proposed: thermal dewetting technique and nanoimprint replica technique. These two techniques are demonstrated to show the capability of fabricating high performance SERS substrate in a reliable and cost efficient fashion. In addition, these two techniques have their own unique characteristics and can be integrated with other sensing techniques to build a serial or parallel sensing system. The breakthrough of a combination system with different sensing techniques overcomes the inherent limitations of SERS detection and leverages it to a whole new level of systematic sensing. The development of a sensing platform based on thermal dewetting technique is covered as the first half of this thesis. The process optimization, selection of substrate material, and improved deposition technique are discussed in detail. Interesting phenomena have been found including the influence of Raman enhancement on substrate material selection and hot-spot rich bimetallic nanostructures by physical vapor deposition on metallic seed array, which are barely discussed in past literature but significantly affect the performance of SERS substrate. The optimized bimetallic backplane assisted resonating nanoantenna (BARNA) SERS substrate is demonstrated with the enhancement factor (EF) of 5.8 × 108 with 4.7 % relative standard deviation. By serial combination with optical focusing from nanojet effect, the nanojet and surface enhanced Raman scattering (NASERS) are proved to provide more than three orders of enhancement and enable us to perform stable, nearly single molecule detection. The second part of this thesis includes the development of a parallel dual functional nano Lycurgus cup array (nanoLCA) plasmonic device fabricated by nanoimprint replica technique. The unique configuration of the periodic nanoscale cup-shaped substrate enables a novel hybrid resonance coupling between SPR from extraordinary (EOT) and LSPR from dense sidewall metal nanoparticles with only single deposition process. The sub-50nm dense sidewall metal nanoparticles lead to high SERS performance in solution based detection, by which most biological and chemical analyses are typically performed. The SERS EF was calculated as 2.8 × 107 in a solution based environment with 10.2 % RSD, which is so far the highest reported SERS enhancement achieved with similar periodic EOT devices. In addition, plasmonic colorimetric sensing can be achieved in the very same device and the sensitivity was calculated as 796 nm/RIU with the FOM of 12.7. It creates a unique complementary sensing platform with both rapid on-site colorimetric screening and follow-up precise Raman analysis for point of care and resource limited environment applications. The implementations of bifunctional sensing on opto-microfluidic and smartphone platforms are proposed and examined here as well