Synthesis and Characterization of Branched and Hyperbranched Polyetherimides and Selective Chemistry on the Nanolithographically Defined Silicon(100) Surface

168 p.Thesis (Ph.D.)--University of Illinois at Urbana-Champaign, 2000.Part II of this thesis describes studies regarding spatially defined, area selective chemistry on the Si(100)-2 x 1 surface. Using the tip of a scanning tunneling microscope (STM) as a localized electron beam, hydrogen can be site selectively removed from the hydrogen-terminated Si(100)-2 x 1 surface in ultrahigh vacuum (UHV) to expose nanometer sized, highly reactive "templates" of clean Si(100). The inherent reactivity differences between the clean and hydrogen terminated surface allow for the selective reaction of organic olefins such as norbornadiene and metal precursors such as titanium tetrachloride were shown to chemoselectively react with the nanopatterned Si(100) surface. Additional studies of the hydrogen-terminated Si(100) exposed to ambient conditions showed that the UHV prepared hydrogen-terminated silicon surface is stable and that using proper precautions the exposed surface can be reintroduced into UHV without damage or contamination. This will provide new opportunities for ex-situ chemical elaboration of chemically modified nanopatterned areas on the silicon surface.U of I OnlyRestricted to the U of I community idenfinitely during batch ingest of legacy ETD