Mediated Patterning of Sol -Gel Thin Layers: Shrinkage, Decohesion, and Lift-Off

231 p.Thesis (Ph.D.)--University of Illinois at Urbana-Champaign, 2003.The shrinkage and densification of sol-gel layers were determined by in-situ and ex-situ measurements, where a ∼30% decrease in thickness (t) was typical during drying of sol-gel layers (T 25 MPa and greater than the fracture strength of silicon. In this work, hydrophobic surface regions, facilitated by directed mu-CP of a molecular film, affected adhesion so as to reduce the substrate constraint and promote de-cohesion of the sol-gel film on the sub-micron scale. That is, selective de-cohesion and lift-off were enabled by the control of local mechanical interfacial constraints.U of I OnlyRestricted to the U of I community idenfinitely during batch ingest of legacy ETD