Add to ORKGA novel process for the fabrication of microelectromechanical systems (MEMS) has been introduced. One potential application of this process is a radio frequency (RF) MEMS switch. This thesis provides an overview of the measurement and modeling techniques used to verify the functionality of an RF MEMS switch that was fabricated using this process. This thesis confirms that this specific RF MEMS design was not fully functioning, but can still be measured, characterized, and modeled
This paper emphasis on state-of-the-art of the earlier until the current trend and demand, principle...
This thesis presents the RF and mechanical design of a metal-to-metal contact RF MEMS switch. Metal-...
A parametric analysis on the design of RF MEMS series switches is performed. The main design variabl...
A novel process for the fabrication of microelectromechanical systems (MEMS) has been introduced. On...
Radio-frequency Microelectromechanical Systems (RFMEMs) are collections of micro-scaled components s...
This article describes the fabrication and experimental results of a novel step structure Radio Freq...
This thesis reports on the development of a novel 77GHz low loss MEMS switch with a mechanically unr...
Radio Frequency Micro-Electro-Mechanical Systems (RF MEMS) is the “enabling” technology th...
Thesis (M. Eng.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Compute...
The research focused on the design, fabrication and measurement of a low actuation voltage micro ele...
There is an increased demand on efficient use of frequency spectrum required by the modern wireless ...
The aim of the project is to study state of the a1t in the design, development and applications of R...
A challenge in designing a RF MEMS switch is the determination of its parameters to satisfy the appl...
This review paper described a trend of MEMS switch development towards better performance in actuati...
Micro Electro Mechanical Systems (MEMS) is an integration of sensors, actuators, microstructures and...
This paper emphasis on state-of-the-art of the earlier until the current trend and demand, principle...
This thesis presents the RF and mechanical design of a metal-to-metal contact RF MEMS switch. Metal-...
A parametric analysis on the design of RF MEMS series switches is performed. The main design variabl...
A novel process for the fabrication of microelectromechanical systems (MEMS) has been introduced. On...
Radio-frequency Microelectromechanical Systems (RFMEMs) are collections of micro-scaled components s...
This article describes the fabrication and experimental results of a novel step structure Radio Freq...
This thesis reports on the development of a novel 77GHz low loss MEMS switch with a mechanically unr...
Radio Frequency Micro-Electro-Mechanical Systems (RF MEMS) is the “enabling” technology th...
Thesis (M. Eng.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Compute...
The research focused on the design, fabrication and measurement of a low actuation voltage micro ele...
There is an increased demand on efficient use of frequency spectrum required by the modern wireless ...
The aim of the project is to study state of the a1t in the design, development and applications of R...
A challenge in designing a RF MEMS switch is the determination of its parameters to satisfy the appl...
This review paper described a trend of MEMS switch development towards better performance in actuati...
Micro Electro Mechanical Systems (MEMS) is an integration of sensors, actuators, microstructures and...
This paper emphasis on state-of-the-art of the earlier until the current trend and demand, principle...
This thesis presents the RF and mechanical design of a metal-to-metal contact RF MEMS switch. Metal-...
A parametric analysis on the design of RF MEMS series switches is performed. The main design variabl...