DOIAbstract
Electromechanical transducers that utilize the piezoelectric effect have been increasingly used in micro-electromechanical systems (MEMS) either as substrates or as thin films[...
Electromechanical transducers that utilize the piezoelectric effect have been increasingly used in micro-electromechanical systems (MEMS) either as substrates or as thin films[...
The MEMS (Micro Electro-Mechanical Systems) market returned to growth in 2010. The total MEMS market...
Nanoelectromechanics of piezoelectric indentation and applications to scanning probe microscopies of...
Based on the premise “anything thin is flexible„, the field of flexible electronics has ...
Electromechanical transducers that utilize the piezoelectric effect have been increasingly used in m...
This is the second volume of the Special Issue focused on piezoelectric transducers, covering a wide...
Micro-Electro-Mechanical Systems (MEMS) devices are widely used for motion, pressure, light, and ult...
Advances in miniaturization of sensors, actuators, and smart systems are receiving substantial indus...
Electromechanical transducers based on piezoelectric layers and thin films are continuously finding ...
AbstractIntegration of materials other than silicon and its compounds into micromachined transducers...
A short overview is given on deposition and integration of PZT thin films on silicon for MEMS applic...
AbstractIntegration of materials other than silicon and its compounds into micromachined transducers...
Micro-electro-mechanical systems (MEMS) technology is revolutionizing industrial and consumer produc...
On the use of shape memory alloy thin films to tune the dynamic response of micro-cantilever
During recent years, the study of micro-electromechanical systems (MEMS) has shown that there are si...
As fabrication technologies advance, the packaging of MEMS device is being developed in two main dir...
The MEMS (Micro Electro-Mechanical Systems) market returned to growth in 2010. The total MEMS market...
Nanoelectromechanics of piezoelectric indentation and applications to scanning probe microscopies of...
Based on the premise “anything thin is flexible„, the field of flexible electronics has ...
Electromechanical transducers that utilize the piezoelectric effect have been increasingly used in m...
This is the second volume of the Special Issue focused on piezoelectric transducers, covering a wide...
Micro-Electro-Mechanical Systems (MEMS) devices are widely used for motion, pressure, light, and ult...
Advances in miniaturization of sensors, actuators, and smart systems are receiving substantial indus...
Electromechanical transducers based on piezoelectric layers and thin films are continuously finding ...
AbstractIntegration of materials other than silicon and its compounds into micromachined transducers...
A short overview is given on deposition and integration of PZT thin films on silicon for MEMS applic...
AbstractIntegration of materials other than silicon and its compounds into micromachined transducers...
Micro-electro-mechanical systems (MEMS) technology is revolutionizing industrial and consumer produc...
On the use of shape memory alloy thin films to tune the dynamic response of micro-cantilever
During recent years, the study of micro-electromechanical systems (MEMS) has shown that there are si...
As fabrication technologies advance, the packaging of MEMS device is being developed in two main dir...
The MEMS (Micro Electro-Mechanical Systems) market returned to growth in 2010. The total MEMS market...
Nanoelectromechanics of piezoelectric indentation and applications to scanning probe microscopies of...
Based on the premise “anything thin is flexible„, the field of flexible electronics has ...
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