Electron interaction cross sections for species found in low-temperature industrial plasma environments are a crucial component to allow for accurate modeling of those plasmas. However, such data are still rarely reported in the literature, due to the complexities of working with such highly reactive species in a laboratory. Here, absolute differential cross section measurements for a 'plasma-like' gas mixture, containing CF3I, CF3, I2, I and C2F6, are reported
Electron impact total cross sections (50-2000 eV) and total ionization cross sections (threshold to ...
Low-temperature reactive plasmas employing electronegative gases are often used for mate-rial proces...
We probe the electron attachment in hexafluoropropylene oxide, C3F6O, a gas widely used in plasma te...
Electron interaction cross sections for species found in low-temperature industrial plasma environme...
The supply of absolute electron-impact cross sections for molecular targets and radicals is extremel...
We report total electron scattering cross sections (TCS) for SF6, SF5 CF3, and CF3I, molecules of in...
Recent progress in the measurement of absolute collision cross sections for electron molecule scatte...
Weakly ionized plasmas at or near 1 atm pressure, or atmospheric-pressure plasmas, have received inc...
Electron collision cross sections for highly reactive CFx (x = 1-3) radicals are required to model t...
In the plasmas used in semiconductor fabrication, collisions between electrons and polyatomic molecu...
In the plasmas used in semiconductor fabrication, collisions between electrons and polyatomic molecu...
1 pag., 1 fig. -- Open Access funded by Creative Commons Atribution Licence 3.0We report absolute e...
Recent advances in the measurement of electron collisions with atoms and molecules are discussed and...
Numerical modelling and experimental measurements are used to investigate hydrogen plasmas in the MA...
International audienceA global model has been developed for low-pressure (3-20m Torr), radio-frequen...
Electron impact total cross sections (50-2000 eV) and total ionization cross sections (threshold to ...
Low-temperature reactive plasmas employing electronegative gases are often used for mate-rial proces...
We probe the electron attachment in hexafluoropropylene oxide, C3F6O, a gas widely used in plasma te...
Electron interaction cross sections for species found in low-temperature industrial plasma environme...
The supply of absolute electron-impact cross sections for molecular targets and radicals is extremel...
We report total electron scattering cross sections (TCS) for SF6, SF5 CF3, and CF3I, molecules of in...
Recent progress in the measurement of absolute collision cross sections for electron molecule scatte...
Weakly ionized plasmas at or near 1 atm pressure, or atmospheric-pressure plasmas, have received inc...
Electron collision cross sections for highly reactive CFx (x = 1-3) radicals are required to model t...
In the plasmas used in semiconductor fabrication, collisions between electrons and polyatomic molecu...
In the plasmas used in semiconductor fabrication, collisions between electrons and polyatomic molecu...
1 pag., 1 fig. -- Open Access funded by Creative Commons Atribution Licence 3.0We report absolute e...
Recent advances in the measurement of electron collisions with atoms and molecules are discussed and...
Numerical modelling and experimental measurements are used to investigate hydrogen plasmas in the MA...
International audienceA global model has been developed for low-pressure (3-20m Torr), radio-frequen...
Electron impact total cross sections (50-2000 eV) and total ionization cross sections (threshold to ...
Low-temperature reactive plasmas employing electronegative gases are often used for mate-rial proces...
We probe the electron attachment in hexafluoropropylene oxide, C3F6O, a gas widely used in plasma te...