Heterogeneous Integration of Microdisk Lasers on Silicon Strip Waveguides for Optical Interconnects

A new approach is proposed to realize an optical link for intrachip optical interconnects. This link includes III-V compound-based laser sources and photodctcctors, and silicon-on-insulator-bascd strip waveguides. The heterogeneous integration of an InP-bascd microdisk laser with a silicon waveguide using SiO2-SiO2 molecular bonding and nanofabrication procedures is emphasized. The technological procedure is described and first experimental results show that, with an adequate configuration, 35% of light could be coupled from the optically pumped microlaser to the waveguide, as a result of the vertical evanescent coupling