Novel matching lens and spherical ionizer for a cesium sputter ion source

The beam optics of a multi-sample sputter ion source, based on the NECMCSNICS, has been modified to accommodate cathode voltages higher than 5 kV and dispenses with the nominal extractor. The cathode voltage in Cs sputter sources plays the role of the classical extractor accomplishing the acceleration of beam particles from eV to keV energy, minimizing space charge effects and interactions between the beam and residual gas. The higher the cathode voltage, the smaller are these contributions to the emittance growth. The higher cathode voltage also raises the Child’s law limit on the Cs current resulting in substantially increased output. The incidental focusing role of the extractor is reallocated to a deceleration Einzel lens and the velocity change needed to match to the pre-acceleration tube goes to a new electrode at the tube entrance. All electrodes are large enough to ensure that the beam fills less than 30% of the aperture to minimize aberrations. The improvements are applicable to sputter sources generally