AlGaInP/AuBe/glass Light-emitting Diodes Fabricated by Wafer Bonding Technology

[[abstract]]An AlGaInP/AuBe/glass light-emitting diode (LED) was fabricated by a wafer bonding technique. The AlGaInP LED was grown on a temporary GaAs substrate by metalorganic vapor phase epitaxy. By bonding the AuBe/glass substrate on top of epitaxial layers, the temporary GaAs substrate was removed. The luminance of this wafer-bonded device is about 3050 cd/m2 (600 nm wavelength) at an operating current of 20 mA. It is about three times brighter than a conventional device with an absorbing GaAs substrate. This could be due to the fact that the AuBe/glass substrate serves as a reflective mirror, improving the light extraction efficiency. � 1999 American Institute of Physics