The Numerical and Analytical Analysis of the Diaphragm Deflection Actuated by the Shear Mode Piezoelectric Actuator in Micropump

[[abstract]]A shear mode piezoelectric actuator is first applied to deflect the rectangular diaphragm of the micropump designed with the rectangular pressure chamber and the diffuser as the dynamic passive valve. The deflection of the diaphragm and resulting volume displacement in pressure chamber are analyzed by analytical and numerical method. In order to estimate the maximum actuating force and deflection of the shear mode piezoelectric actuator, the piezoelectric characteristic curve which represents the relation of central deflection and anti-deflection force under certain actuating voltage is obtained. The diaphragm characteristic curve represents the direct proportion of diaphragm central deflection to action force. By combining the piezoelectric characteristic curve with the diaphragm characteristic curve, the actuated diaphragm central deflection can be obtained under certain actuating voltage. Furthermore, both the linear relations including the diaphragm central deflection in proportion to actuating voltage and the volume displacement in proportion to diaphragm central deflection are obtained