[[alternative]]The Development of Non-Contact Torsion Sensors

碩士機電工程學系[[abstract]]目前市面上用於量測扭力大都為接觸式扭力感測器，皆需接線至監控系統。本文旨在研發新式的非接觸扭力感測器，以電容與光學雙工感測的架構來測量扭力。運用微機電技術為平台設計出雙工感測器的架構，雙工感測器以指叉狀結構同時作為電容感測與光學感測的感測元計，並搭配感測信號處理與無線傳輸電路。電容感測電路包含非穩態震盪電路與433MHz無線傳輸模組、頻率轉電壓電路，光學感測電路包含光學信號源與光感測器。光柵結構可量測0~10N-m，當扭力在0~3N-m時解析度為2.693V/m-N，當扭力在3.5~10N-m時解析度為0.053V/m-N。指叉狀邊際電容結構可量測位移0~130μm變化量，對應電容值為220pf~187pf。[[abstract]]This paper presents two novel noncontact torsion sensor designs, noncontact capacitance and optical torsion sensors. The dual-function sensor combined with a bridge capacitance and an optical grating structure. The capacitance sensor consists of a oscillate circuit, a 433MHz wireless module, and a frequency-to-voltage converter. The optical sensor consists of a laser diode and an optical detector. Optical grating sensor can measured torque from 0 to 10 N-m. The experimental results demonstrate that the normal sensitivity of the torsion optical sensor is about 2.693V/m-N when the torque is 0 to 3 N-m and the normal sensitivity of the torsion optical sensor is about 2.693V/m-N when the torque is 3.5 to 10 N-m