[[alternative]]Development of the Moving Magnet Galvanometer Scanning System

碩士機電工程學系[[abstract]]摘要 本文研發雷射加工系統之動磁式掃瞄系統。該掃瞄系統包括動磁式致動器本體、位移感測器及其驅動電路。 其中動磁式致動器之轉子，由銣鐵硼製成，定子為線圈繞組。本文位置感測器採用電容式及光學式作為回鐀訊號。其驅動電路則使用LM675T之功率運算放大器，搭配比例微分控制器。 最後將兩組振鏡系統組成雷射投影裝置，並且改進及測試其時間響應之特性。 關鍵詞：電磁式致動器、比例微分控制器、振鏡系統[[abstract]]Abstract The purpose of this thesis is to develop the moving magnet type galvanometer scanning system which is used in the Laser maching processes. The galvo system consists of three main components. The moving magnet type actuator the position sensor and the servo driver that controls the system. The moving magnet in which the NdFeB material is part of the rotor and the coil is part of the stator provides very high time response. Two types of position detector the moving dielectric capacitive sensor and optical position detector are used as the feedback elements in the system. Driving the open-loop actuator is a LM675T power op-amp with an analogy PD controller. Then a Laser projector project which consists of two scanning system is presented for marking or other infer motional purposes. Finally the dynamic characteristics of the presented system are verified and improved in this paper. Keyword: moving magnet type actuator, PD control, galvo syste