[[alternative]]Study of the electrical properties of the electrode patterning for transparent conductive oxide thin films with Nd:YAG laser

碩士機電工程學系[[abstract]]本文利用Nd:YAG雷射於玻璃基板與塑膠基板之透明導電薄膜進行電極圖型之電性研究。 首先，以有限元素分析軟體ANSYS，針對基板進行溫度場理論分析模擬，探討雷射功率對於基板的影響。此外，藉由改變不同雷射功率、脈衝重覆頻率與進給速度，蝕刻移除ITO薄膜。在雷射加工後，以光學顯微鏡觀測基板上之ITO電路圖案蝕刻形貌與基板受損情形，討論其較適用之電極圖案化參數。最後以四點探針量測儀器量測雷射加工過後所得的電阻變化情形。[[abstract]]The purpose of this thesis is to investigate the electrical properties of the electrode patterning for transparent and conductive ITO thin films on the glass and plastic substrate using Nd:YAG laser. Then the results of the laser etching , drilling and patterning of the ITO film on the substrates with different laser powers, repetitions, and feed rates are presented. After processing the profile of the grooves and the electrode patterning were carried out with the optical microscope. Finally, the resistance of the electrode patterning was measured with the four-point probe