[[alternative]]Chamber Design of UV-O3 Dry Cleaning System and Process Uniformity Study of Organic Contamination

碩士機電工程學系[[abstract]]在TFT-LCD製程中，清洗製程對於良率影響佔有相當大的比重，因玻璃基板的表面潔淨度，會影響鍍膜或塗佈的膜厚及厚度均勻性。製程潔淨度要求除了要去除玻璃基板表面的Particle外，還要將基板表面的有機污染物去除，才能達到效果，所以在清洗製程這段大多是UV/O3乾式清洗機搭配濕式清洗機來運作。在有機物去除的方式，是將玻璃基板經過一主波長185nm及254nm之紫外線燈照射的腔體，由於經此紫外線燈照射後會產生臭氧，而臭氧再與分解後的有機污染物結合成碳氫化合物，再將其排出腔體外，這樣來將有機污染物去除，達到洗淨的效果。而驗證潔淨度的方式是將洗淨後的基板滴上水滴，利用水接觸角檢測儀器量測水滴與基板的接觸角，接觸角越小洗淨效果越佳，反之則越差。由於TFT-LCD製程條件要求嚴苛，所以在洗淨均勻性也有一定的要求，即玻璃基板有效表面積範圍內，任意點所量測到的水接觸角均能在一定角度以下才達要求。以致於腔體流場的規劃與設計就相當重要，因為是利用臭氧這種氣體來達到清洗作用，如何讓玻璃基板進到腔體內，表面能分佈均勻的臭氧是本篇論文所要研究的課題。[[abstract]]In TFT-LCD process, effective cleaning process has a major impact on the overall yield rate. The coating thickness and uniformity of the film are affected by the cleanness of the surface of the glass plate. The cleaning process is required not only to depose the particles on the surface but also to remove the organic contamination. To date the cleaning process is usually performed utilizing a UV/O3 dry cleaning machine and a wet cleaning unit. The primary method to clean organic contamination on the glass surface is to treat the glass surface with Ultraviolet (UV) ray from a UV lamp, which has its main UV wavelengths at 185nm and 254nm. The UV ray will generate ozone (O3), which will break the organic contamination molecules on the glass surface and form hydrocarbon compounds, the vapor phase compounds are then discharged outside the reacting chamber. The organic contamination is then removed after the UV/O3 treatment. The contamination cleaning effect is verified by measuring the contact angle of water droplet on the glass surface. The smaller the contact angle, the better the cleaning effect. In TFT-LCD process line, cleaning homogeneity is also verified. Within the effective area on the glass, contact angle measured at multi points have to be less than the specified value. To achieve this standard, the ozone gas must be uniformly distributed on the glass surface inside the chamber. The planning and design of the gas flow pattern across the glass plate is key to the cleaning effect, and was studied in this research