[[alternative]]Rotor Dynamic Analysis and Experimental Study of the Aerostatic Spindle

碩士機電工程學系[[abstract]]高速氣浮主軸系統已廣泛運用在精密機械上，例如晶圓切割機、PCB鑽孔機等。由於主軸的性能對於製程的品質影響至鉅，故本文著重在主軸的動態分析與實驗研究。 首先，氣體靜壓軸承是利用有限差分法進行性能分析求得承載力與剛性，並考慮動壓效應對軸承性能的影響。 將軸承剛性代入主軸—軸承系統，利用有限元素法分析其動態特性，最後繪出坎貝爾圖(Campbell map)、臨界轉速的振型及臨界轉速與軸承剛性的關係圖並與實驗比對。[[abstract]]The high-speed air spindle system has been used widely in various kinds of the precision machines including the wafer saw cutting machines, printed circuit board drilling etc. The performance of the shaft will influence the quality of the manufacturing greatly. So this thesis discuss dynamic behavior analysis and experiment results for the air-spindle system. First, we used the Finite Difference Method to analyze the performances which include load capacity, stiffness, and realize the aerodynamic effect for the air-bearing. Then, we used the Finite Element Method to analyze the dynamic characteristics of the rotor-bearing system. Finally the Campbell diagram, mode shape and the critical speed versus bearing stiffness diagrams in comparison with the experiment results will be reified in this paper