Pull-in instability and free vibration of electrically actuated poly-SiGe graded micro-beams with a curved ground electrode

This paper investigates the pull-in instability and free vibration of functionally graded poly-SiGe micro-beams under combined electrostatic force, intermolecular force and axial residual stress, with an emphasis on the effects of ground electrode shape, position-dependent material composition, and geometrically nonlinear deformation of the micro-beam. The differential quadrature (DQ) method is employed to solve the nonlinear differential governing equations to obtain the pull-in voltage and vibration frequencies of the clamped poly-SiGe micro-beams. The present analysis is validated through direct comparisons with published experimental results and excellent agreement has been achieved. A parametric study is conducted to investigate the effects of material composition, ground electrode shape, axial residual stress and geometrical nonlinearity on the pull-in voltage and frequency characteristics