Capacitive (condenser) MEMS microphones have been developed using various design and fabrication techniques to improve performance. Mechanical sensitivity of a condenser MEMS microphone can be increased by reducing the residual stress of the diaphragm using several design approaches including corrugated diaphragms, and in recent years, various spring type diaphragms. The electrical sensitivity of the condenser microphone is proportional to the deflection of the diaphragm, however, the parabolic deflection of the diaphragm, and thus its effective diaphragm area, has reduced the sensitivity of parallel plate type capacitor on a condenser MEMS microphone. This paper presents the numerical analysis on the effective diaphragm area of several con...
ISBN 978-2-35500-013-3International audienceThis paper presents a standard complementary metal- oxid...
MEMS offer different fabrication process to fabricate diaphragms in various applications such as mic...
This paper presents comprehensive guidelines for the design and analysis of a thin diaphragm that is...
Capacitive microphones (condenser microphones) work on a principle of variable capacitance and volta...
Audio applications such as mobile communication and hearing aid devices demand a small size but high...
Audio applications such as mobile communication and hearing aid devices demand a small size but high...
New mobile devices need microphones with a small size, low noise level, reduced cost and high stabil...
New mobile devices need microphones with a small size, low noise level, reduced cost and high stabil...
In this research project, the design and performance optimization techniques of a microelectromechan...
Abstract not reproduced here by request of the publisher. The text is available from: http://dx.doi....
Condenser microphones of all types are traditionally made with a planar electrode parallel to an ele...
19th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2017, ...
In this project, a novel diaphragm-backplate structure for silicon condenser microphone is proposed....
Several models concerning the sensitivity of capacitive pressure sensors have been presented in the ...
This study reports a CMOS-MEMS condenser microphone implemented using the standard thin film stackin...
ISBN 978-2-35500-013-3International audienceThis paper presents a standard complementary metal- oxid...
MEMS offer different fabrication process to fabricate diaphragms in various applications such as mic...
This paper presents comprehensive guidelines for the design and analysis of a thin diaphragm that is...
Capacitive microphones (condenser microphones) work on a principle of variable capacitance and volta...
Audio applications such as mobile communication and hearing aid devices demand a small size but high...
Audio applications such as mobile communication and hearing aid devices demand a small size but high...
New mobile devices need microphones with a small size, low noise level, reduced cost and high stabil...
New mobile devices need microphones with a small size, low noise level, reduced cost and high stabil...
In this research project, the design and performance optimization techniques of a microelectromechan...
Abstract not reproduced here by request of the publisher. The text is available from: http://dx.doi....
Condenser microphones of all types are traditionally made with a planar electrode parallel to an ele...
19th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2017, ...
In this project, a novel diaphragm-backplate structure for silicon condenser microphone is proposed....
Several models concerning the sensitivity of capacitive pressure sensors have been presented in the ...
This study reports a CMOS-MEMS condenser microphone implemented using the standard thin film stackin...
ISBN 978-2-35500-013-3International audienceThis paper presents a standard complementary metal- oxid...
MEMS offer different fabrication process to fabricate diaphragms in various applications such as mic...
This paper presents comprehensive guidelines for the design and analysis of a thin diaphragm that is...