H2 and NO2 gas sensors with ZnO nanobelt layer on 36° LiTaO3 and 64° LiNbO3 SAW transducers

Single crystal nanobelts of ZnO were synthesized and deposited onto 36° YX LiTaO<sub>3</sub> and 64° YX LiNbO<sub>3</sub> surface acoustic wave (SAW) devices for gas sensing applications. Sensor response, defined as the change in resonant frequency, was measured for H<sub>2</sub> and NO<sub>2</sub> between 20 and 200°C. Measured sensor responses were 3.5 kHz towards 10 ppm NO<sub>2</sub> for a 64° LiNbO<sub>3</sub> SAW transducer operating at 160°C and 3 kHz towards 1% H<sub>2</sub> for a 36° LiTaO<sub>3</sub> SAW transducer operating at 185°C temperature