Phase differential angular rate sensor-concept and analysis

This paper proposes and analyzes a new differential phase angular rate (AR) sensor employing a vibrating beam mass structure that traces an elliptical path when subject to rotation due to Coriolis force. Two sensing elements are strategically located to sense a combination of drive and Coriolis vibration to create a phase differential representative of the input rotation rate. A general model is developed, describing the device operation. The main advantages of the phase detection scheme are explored, including removing the need to maintain constant drive amplitude, independence of sensing element gain factor, and advantageous response shapes. A ratio of device parameters is defined and shown to dictate the device response shape. This ratio can be varied to give an optimally linear phase difference output over a set input range, a high sensitivity around zero input rate, or a response shape not seen before, that can give maximum sensitivity around an offset from the zero-rate input. This may be exploited in an array configuration for a highly accurate device over a wide input range. A worked example shows how the developed equations can be used as design tools to achieve a desired response with low sensitivity to variation in device parameters