Kelvin probe force microscopy (KPFM) is a powerful tool to measure surface potential with resolutions in the order of atomic/nanometer scales, and could also provide direct measurements of the surface potential on interfaces and junctions of solar cell devices. In this paper, the whole surface potential distribution along the cross-section of the polycrystalline silicon solar cell was illustrated by KPFM for the first time. Interestingly, the surface potential presents a two-stepwise downward profile from Al electrode to Ag electrode, and surface potential skip-steps occur at Al/p-Si interface and p-n junction, respectively. Notably, the p(+) layer due to the Al doping was firstly identified by KPFM. Devices of three different efficiencies ...