RANDOMLY CONTROLLED NIETAMATERIAL MODULATOR FOR DYNAMIC TUNING OF OPTICAL PROPERTY

We design and fabricate a randomly controlled metamaterial modulator (RCMM) which can dynamically tune reflection in infrared region. The RCMM is a metamaterial-cell array, and each cell is comprised of a raw of S-shaped cantilevers called meta-molecules. The devices were produced by using focused-ion-beam etching and deposition on suspended metal-dielectric-metal membranes. Word/bit-line method is introduced to precisely control the thermoelectricity-caused bending of every individual meta-cell in the RCMM. A 2x2 RCMM exhibits 16 different states, which represents different operation conditions of the device, resulting in the shift of the reflection spectrum. The end portion of a meta-cell with 20 mu m-long meta-molecules can be raised up to 2 mu m, and the corresponding optical reflection of the device will be modulated by up to 40%.CPCI-S(ISTP)wuwg@pku.edu.cn620-62