A novel electrostatically driven bulk-micromachined on-off optical switch

In this paper,a novel bulk micromachined on-off optical switch is proposed with the techniques of silicon-glass wafer bonding and deep reactive ion etch.The micromechanical optical switch includes a slope anchor and a beam with a shutter,in which the beam is laterally driven by electrostatic actu...In this paper,a novel bulk micromachined on-off optical switch is proposed with the techniques of silicon-glass wafer bonding and deep reactive ion etch.The micromechanical optical switch includes a slope anchor and a beam with a shutter,in which the beam is laterally driven by electrostatic actu...Chinese Institute of Electronics(CIE)、IEEE Beijing Section4Vol.