Generation of debris in water-assisted femtosecond laser drilling of silica glass

We report on the generation of debris in the femtosecond laser drilling of silica glass in water. The morphology of the debris ejected from the amorphous synthesized silica is examined by scanning electron microscopy and the chemical structures are investigated by X-ray diffraction analysis and Fourier transform infrared spectroscope. ? 2005 The Japan Society of Applied Physics.EI0118013-80154