A Novel Micro Pirani Gauge with Mono-wire Sensing Unit for Microsystem Application

This paper reports a novel, simple, low-cost and high sensitivity micro Pirani gauge to monitor long-time pressure change and stability inside a vacuum package. The packaging structure is very simple with one wire as sensing part only. Two ends of a metal wire with a certain temperature coefficient of resistance are bonded to the pads of the ceramic structure with a cavity for microsystem application. The metal wire and the packaged part can be formed as a micro Pirani gauge. The dynamic range of this novel Pirani gauge in our experiment is from 1Pa to 100Pa.http://gateway.webofknowledge.com/gateway/Gateway.cgi?GWVersion=2&SrcApp=PARTNER_APP&SrcAuth=LinksAMR&KeyUT=WOS:000289501700082&DestLinkType=FullRecord&DestApp=ALL_WOS&UsrCustomerID=8e1609b174ce4e31116a60747a720701Engineering, Electrical & ElectronicCPCI-S(ISTP)