A Low-Noise HV Interface Circuit for MEMS Vibratory Gyroscope

The paper presents a low-noise high voltage (HV) CMOS Interface ASIC designed for MEMS vibratory gyroscopes. A closed-loop control is realized in the driving mode. An in-chip level shifter is designed in the loop to achieve a high DC voltage level of 5V which can excite the gyroscope. A DC biasing method is adopted in the interface circuit to convert the amplitude-modulated capacitive signal into voltage. The chip occupies 2.5 X 2.0mm(2) in a 0.35 mu m 2P3M BCD HV process, which offers buried layer and high voltage N-well isolation to block out the potential coupling noise. Simulation results show that the drive axis can accomplish a closed-loop self-oscillation of the MEMS gyroscope.http://gateway.webofknowledge.com/gateway/Gateway.cgi?GWVersion=2&SrcApp=PARTNER_APP&SrcAuth=LinksAMR&KeyUT=WOS:000304037500035&DestLinkType=FullRecord&DestApp=ALL_WOS&UsrCustomerID=8e1609b174ce4e31116a60747a720701Engineering, Electrical & ElectronicPhysics, AppliedEICPCI-S(ISTP)